Semiconductor element and semiconductor memory device using the same

ABSTRACT

A field-effect semiconductor element implemented with a fewer number of elements and a reduced area and capable of storing data by itself without need for cooling at a cryogenic temperature, and a memory device employing the same. Gate-channel capacitance is set so small that whether or not a trap captures one electron or hole can definitely and distinctively be detected in terms of changes of a current of the semiconductor FET element. By detecting a change in a threshold voltage of the semiconductor element brought about by trapping of electron or hole in the trap, data storage can be realized at a room temperature.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of application Ser. No. 09/521,970,filed on Mar. 9, 2000 now U.S. Pat. No. 6,291,852; which is acontinuation of application Ser. No. 09/126,437, filed on Jul. 30, 1998now U.S. Pat. No. 6,104,056; which is a continuation of application Ser.No. 08/778,260, filed on Jan. 8, 1997 now abandoned; which is acontinuation of application Ser. No. 08/291,752, filed on Aug. 16, 1994now U.S. Pat. No. 5,600,163; the entire disclosures of which are herebyincorporated by reference.

BACKGROUND OF THE INVENTION

The present invention relates to a semiconductor element suited forintegration with a high density and a semiconductor memory deviceimplemented by using the same.

Heretofore, polycrystalline silicon transistors have been used aselements for constituting a static random access memory device (referredto as SRAM in abbreviation). One of the relevant prior art techniques isdescribed in T. Yamanaka et al: IEEE International Electron DeviceMeeting, pp. 477-480 (1990). By making the most of polycrystallinesilicon transistors, integration density of the integrated circuit canbe enhanced, the reason for which can be explained by the fact that thepolycrystalline silicon transistor can be formed in stack or laminationatop a conventional bulk MOSFET (Metal-Oxide Semiconductor Field EffectTransistor) formed on a surface of a semiconductor substrate with aninsulation film being interposed between the polycrystalline silicontransistor and the bulk MOSFET. In the SRAM, implementation of a memorycell for one bit requires four bulk MOSFETs and two polycrystallinesilicon transistors. However, because the polycrystalline silicontransistors can be stacked atop the bulk MOSFETs, a single memory cellof the SRAM can be implemented with an area which substantiallycorresponds to that required for the bulk MOSFETs.

As another preceding technique related to the invention, there may bementioned a single-electron memory described in K. Nakazato et al:Electronics Letters, Vol. 29, No. 4, pp. 384-385 (1993). It is reportedthat a memory could have been realized by controlling electron on aone-by-one basis. It is however noted that the operation temperature isas very low as on the order of 30 mK.

As a further prior art technique related to the invention, there may bementioned one which is directed to the study of RTN (Random TelegraphNoise) of MOSFET, as is disclosed in F. Fang et al: 1990 Symposium onVLSI Technology, pp. 37-38 (1990). More specifically, when a draincurrent of a MOSFET is measured for a predetermined time under theconstant-voltage condition, there makes appearance such phenomenon thatstate transition takes place at random between a high-current state anda low-current state. This phenomenon is referred to as the RTN, a causefor which can be explained by the capture or entrapping of a singleelectron in a level node existing at an interface between silicon (Si)and silicon oxide (SiO₂) and the release therefrom, whereby the draincurrent undergoes variations. However, the RTN remains only as a subjectfor a fundamental study concerning the current noise in the MOSFET, andany attempt or approach for positively making use of the RTN inpractical applications has not been reported yet at all.

At present, the technology for processing a semiconductor integratedcircuit with high fineness has developed up to such a level where anyattempt for realization of higher fineness will encounter difficulty.Even if it is possible technologically, there will then arise a problemthat intolerably high cost is involved due to the necessity for muchsophisticated technique. Under the circumstances, a great demand existsfor a fundamentally novel method of enhancing the integration density inthe fabrication of semiconductor integrated circuits instead of relyingon a method of implementing the semiconductor elements constituting thesemiconductor integrated circuit simply by increasing the finenessthereof.

On the other hand, the polycrystalline silicon transistor knownheretofore is basically equivalent to a variable resistor element in therespect that resistance between a source and a drain of thepolycrystalline silicon transistor can be controlled by a gate voltage.Consequently, implementation of a memory cell of a SRAM requires as manyas six semiconductor elements inclusive of the conventional MOSFETsformed in a silicon substrate.

By contrast, in the case of a DRAM (Dynamic Random Access Memory),information or data of one bit can be stored in a memory cellconstituted by one MOSFET and one capacitor. For this reason, the DRAMenjoys reputation as a RAM device susceptible to implementation with thehighest integration density. However, because the DRAM is based on sucha scheme that electric charge is read out onto a data wire of whichcapacitance is non-negligible, the memory cell thereof is required tohave capacitance on the order of several ten fF (femto-Farads), whichthus provides a great obstacle to an attempt for further increasingfineness in implementation of the memory cells.

By the way, it is also known that a nonvolatile memory device such as aflash EEPROM (Electrically Erasable and Programmable Read-Only Memory)can be realized by employing MOSFETs each having a floating gate and acontrol gate. Further, as a semiconductor element for such a nonvolatilememory device, there is known MNOS (Metal Nitride Oxide Semiconductor)element. The MNOS is designed to store charge at interface between aSiO₂-film and a Si₃N₄-film instead of the floating gate of the flashEEPROM. Although the use of the MOSFET equipped with the floating gateor the MNOS element is certainly advantageous in that one-bit data canbe held or stored by one transistor over an extended time span, a lot oftime is required for the rewriting operation because a current to thisend has to flow through the insulation film, whereby the number of timesthe rewriting operation can be performed is limited to about 100millions, which in turn gives rise to a problem that limitation isimposed to the applications which the nonvolatile memory device canfind.

On the other hand, the one-electron memory device discussed in theNakazato et al's article mentioned hereinbefore can operate only at atemperature of cryogenic level, presenting thus a problem which is verydifficult to cope with in practice. Besides, a cell of thesingle-electron memory is comprised of one capacitor and two activeelements, which means that a number of the elements as required exceedsthat of the conventional DRAM, to a further disadvantage.

As will be appreciated from the forgoing, there exists a great demandfor a semiconductor element which requires no capacitance elements,differing from that for the DRAM and which can exhibit stored functionby itself in order to implement a memory of higher integration densitythan the conventional one without resorting to the technique forimplementing the memory with higher fineness.

SUMMARY OF THE INVENTION

In the light of the state of the art described above, it is an object ofthe present invention to provide an epoch-making semiconductor elementwhich allows a semiconductor memory device to be implemented with alesser number of semiconductor elements and a smaller area and which perse has data or information storing capability while requiring no coolingat a low temperature such as cryogenic level.

Another object of the present invention is to provide a semiconductormemory device which can be implemented by using the semiconductorelements mentioned above.

A further object of the invention is to provide a data processingapparatus which includes as a storage the semiconductor memory devicementioned above.

For achieving the above and other objects which will become apparent asdescription proceeds, it is taught according to a basic technicalconcept underlying the invention that capacitance between a gate and achannel of a semiconductor field-effect transistor element is set sosmall that capture of a single carrier (electron or hole) by a traplevel can definitely and discriminately detected as a change in thecurrent of the semiconductor field-effect transistor element. Morespecifically, correspondences are established between changes in athreshold value of the semiconductor field-effect transistor element asbrought about by capture of a carrier in the trap and releasingtherefrom and digital values of logic “1” and “0”, to thereby impart tothe semiconductor field-effect transistor element a function orcapability for storing data or information even at a room temperature.

Thus, according to a first aspect of the present invention in its mostgeneral sense thereof, there is provided a semiconductor element whichincludes a source region constituting a source of the semiconductorelement, a drain region constituting a drain of the semiconductorelement, an effective channel region provided between the source regionand the drain region for interconnection thereof, a gate electrodeconnected to the channel region through a gate insulation filminterposed between the gate electrode and the channel region, and alevel node formed between the source region and the drain region in thevicinity of a current path in the channel region for capturing at leastone carrier, wherein effective capacitance (which will be elucidatedlater on) between the gate electrode and the effective channel region isset so small as to satisfy a condition given by the following inequalityexpression:

1/C _(gc) >kT/q ²

where C_(gc) represents the effective capacitance, k representsBoltzmann's constant, T represents an operating temperature in degreeKelvin, and q represents charge of an electron (refer to FIGS. 1A-1D).

According to another aspect of the present invention, there is provideda semiconductor element which includes a source region and a drainregion is connected to the source region through a channel regioninterposed therebetween, a gate electrode connected to the channelregion through a gate insulation film interposed between the gateelectrode and the channel region, at least one carrier confinementregion formed in the vicinity of the channel region for confining acarrier, and a potential barrier existing between the carrierconfinement region and the channel region, wherein effective capacitancebetween the gate electrode and the effective channel region is set sosmall as to satisfy a condition given by the following inequalityexpression:

1/C _(gc) >kT/q ²

where C_(gc) represents the effective capacitance, k representsBoltzmann's constant, T represents an operating temperature in degreeKelvin, and q represents charge of an electron (refer to FIGS. 10A,10B).

According to yet another aspect of the present invention, there isprovided a semiconductor element which includes a source regionconstituting a source of the semiconductor element, a drain regionconstituting a drain of the semiconductor element, the source regionbeing connected to the drain region through a channel region interposedtherebetween, a gate electrode connected to the channel region through agate insulation film interposed between the gate electrode and thechannel region, at least one carrier confinement region formed in thevicinity of the channel region for confining a carrier, and a potentialbarrier existing between the carrier confinement region and the channelregion, wherein a value of capacitance between the channel region andthe carrier confinement region is set greater than capacitance betweenthe gate electrode and the carrier confinement region, and wherein totalcapacitance existing around the carrier confinement region is so set asto satisfy a condition given by the following inequality expression:

q ²/2C _(tt) >kT

where C_(tt) represents the total capacitance, k represents Boltzmann'sconstant, T represents an operating temperature in degree Kelvin, and qrepresents charge of an electron (refer to FIGS. 10A, 10B).

At this juncture, it is important to note that with the phrase “totalcapacitance (C_(tt)) means a total sum of capacitances existing betweenthe carrier confinement region and all the other electrodes than thegate electrode.

In order to increase the number of times the semiconductor memoryelement can be rewritten, it is required to suppress to a possibleminimum degradation of a barrier (insulation film) existing between thechannel region and the carrier confinement region.

In view of the above, there is provided according to a further aspect ofthe invention a semiconductor element which includes a source regionconstituting a source of the semiconductor element, a drain regionconstituting a drain of the semiconductor element, the source regionbeing connected to the drain region through a channel region interposedtherebetween, a gate electrode connected to the channel region through agate insulation film interposed between the gate electrode and thechannel region, at least one carrier confinement region formed in thevicinity of the channel region for confining a carrier, the confinementregion being surrounded by a potential barrier, storage of informationbeing effectuated by holding a carrier in the carrier confinementregion, and a thin film structure having a thickness not greater than 9nm and formed of a semiconductor material in an insulation filmintervening between the channel region and the carrier confinementregion (refer to FIGS. 17A, 17B).

For better understanding of the present invention, the underlyingprinciple or concept thereof will have to be elucidated in some detail.

In a typical mode for carrying out the invention, a polycrystallinesilicon element (see e.g. FIGS. 1A-1D) is imparted with suchcharacteristic that when potential difference between the gate and thesource thereof is increased and decreased repetitively within apredetermined range with a drain-source voltage being held constant,conductance between the source and the drain exhibits a hysteresis evenat a room temperature (see FIG. 2).

More specifically, referring to FIG. 2 of the accompanying drawings,when the gate-source voltage is swept vertically between a first voltageV_(g0) (0 volt) and a second voltage V_(g1) (50 volts), the draincurrent of the polycrystalline silicon element exhibits hysteresischaracteristic. This phenomenon has not heretofore been known at all butdiscovered experimentally first by the inventors of the presentapplication. The reason why such hysteresis characteristic can makeappearance will be explained below.

FIG. 4A shows a band profile in a channel region of a semiconductordevice shown in FIGS. 1A-1D in the state where the gate-source voltageV_(gs) is zero volt. A drain current flows in the directionperpendicular to the plane of the drawing. For convenience ofdiscussion, it is assumed in the following description that thedrain-source voltage is sufficiently low when compared with the gatevoltage, being however understood that the observation mentioned belowapplies equally valid even in the case where the drain-source voltage ishigh.

Now referring to FIG. 4A, there is formed in a channel (3) ofpolycrystalline silicon a potential well of low energy between a gateoxide film (5) and a peripheral SiO₂-protection film (10). In this case,energy level (11) of a conduction band in the channel region (3) whichmay be of p-type or of i-type (intrinsic semiconductor type) or n-typewith a low impurity concentration is sufficiently high when comparedwith energy level of a conduction band in a n-type source region of ahigh impurity concentration or Fermi level (12) in a degenerate n-typesource region of a high impurity concentration. As a consequence, thereexist no electrons within the channel (3). Thus, no drain current canflow.

Further, a trap level (7) exists in the vicinity of the channel (3),which can capture or trap carriers such as electrons. As levels whichpartake in forming the trap level, there are conceivable a levelextending to a grain or a level of group of grains (crystal grains inthe channel regions of polycrystalline silicon) themselves which aresurrounded by a high barrier, level internally of the grain, level at aSi—SiO₂ interface (i.e., interface between the channel region (3) andthe gate oxide film (5)), level inside the gate oxide film (5) andothers. However, it is of no concern which of these levels forms thetrap level. Parenthetically, even after the experiments conducted by theinverters, it can not be ascertained at present by which of theaforementioned levels the carriers or electrons are trapped inactuality. Of the levels mentioned above, energy in the trap level (7)which plays a role in realizing the hysteresis characteristic mentionedabove is sufficiently higher than the Fermi level (12) in the sourceregion (1). Accordingly, no electrons exist in the trap level (7). Atthis juncture, it should be added that although the trap level is shownin FIGS. 4A-4C as existing within the gate oxide film, the trap levelneed not exist internally of the oxide film. It is only necessary thatthe trap level exists in the vicinity of the channel.

As the potential difference V_(gs) between the gate (4) and the source(1) is increased from zero volt to the low threshold voltage V_(l),potential in the channel region (3) increases. Consequently, as comparedwith the initial energy level of the channel region (3) in the statewhere the potential difference V_(gs) is zero (refer to FIG. 4A), thepotential of the channel region (3) for electrons becomes lower underthe condition that the potential difference V_(gs) is higher than zerovolt and lower than the low threshold voltage V_(l). When thegate-source potential difference V_(gs) has attained the low thresholdvoltage V_(l), the Fermi level in the source region (1) approaches tothe energy level in the conduction band of the channel region (3) (witha difference of about kT, where k represents Boltzmann's constant and Trepresents operating temperature in Kelvin). Consequently, electrons areintroduced into the channel region (3) from the source. Thus, a currentflow takes place between the drain and the source.

When the gate voltage is further increased, the number of electronswithin the channel region (3) increases correspondingly. However, whenthe potential difference V_(gs) has reached a capture voltage V_(g1),energy of the trap level (7) approaches to the Fermi level (12), wherebyat least one electron is entrapped or captured by the trap level (7)because of distribution of electrons under the influence of thermalenergy of those electrons which are introduced from the source region(1). At that time, since the level of the trap (7) is sufficiently lowerthan potentials of the gate oxide (5) and peripheral SiO₂-protectionfilm (10), the electron captured by the trap level (7) is inhibited frommigration to the gate oxide film (5) and the peripheral SiO₂-protectionfilm due to thermal energy of electron. Besides, because a grainboundary of high energy of the polycrystalline silicon channel region(3) exists in the vicinity of the trap level (7), for example, at theSi—SiO₂ interface, the electron captured by the trap level (7) can notmove from the trap level (refer to FIG. 4C). However, since the otherelectrons can move, the drain current continues to flow.

In this way, once a single electron is entrapped or captured by the traplevel (7), the threshold voltage of the polycrystalline siliconsemiconductor element shown in FIGS. 1A-1D changes from the lowthreshold voltage V_(l) to the high threshold voltage V_(h), the reasonfor which will be explained below.

When the gate-source potential difference V_(gs) is lowered from thestate shown in FIG. 4C within the range of V_(h)<V_(gs)<V_(g1), thenumber of electrons within the channel region (3) is decreased. However,in general, a high energy region exists in the periphery of the traplevel (7). Accordingly, the electron captured by the trap level (7)remains as it is (refer to FIG. 5A).

When the gate voltage is further lowered to a value at which thepotential difference V_(gs) attains the high threshold voltage V_(h),the Fermi level (12) of the source region (1) becomes different from theenergy level of the conduction band of the channel (3) by ca. kT, as aresult of which substantially all of the electrons within the channeldisappear (see FIG. 5B). Consequently, the drain current can flow nomore. However, the threshold voltage V_(h) at which no drain currentflow becomes higher than the low threshold voltage V_(l) by a voltagecorresponding to the charge of electron captured in the trap level (7).

Further, by lowering the gate-source potential difference V_(gs) to avalue where the potential difference V_(gs) becomes equal to zero,potential in the peripheral high-energy region of the trap level (7)becomes lower in accompanying the lowering of the gate voltage, whichresults in that the electron captured by the trap level (7) is releasedto the region of low energy through tunneling under the effect of theelectric field (refer to FIG. 5C).

Subsequently, the gate-source potential difference V_(gs) is againincreased for the vertical sweeping. By repeating this operation,hysteresis can be observed in the drain current-versus-gate voltagecharacteristic owing to trapping and release of the electron.

In this conjunction, the inventors have discovered that the hysteresischaracteristic mentioned above appears only when the capacitance betweenthe gate and the channel is small. Incidentally, the experimentconducted by the inventors shows that although a semiconductor elementhaving a gate length and a gate width each of 0.1 micron can exhibit theaforementioned hysteresis characteristic, a semiconductor element whosegate length and gate width are on the order of 1 (one) micron isincapable of exhibiting such hysteresis characteristic.

Thus, it must be emphasized that smallness of the capacitance C_(gc)between the gate electrode and the channel region is indispensable forthe aforementioned hysteresis characteristic to make appearance, thereason for which may be explained as follows. There exists between anamount of charge Q_(s) stored in the trap level and a change ΔV_(t)(=V_(h)−V_(l)) in the threshold value or voltage the following relation:

ΔV _(t) =Q _(s) /C _(gc)  (1)

where C_(gc) represents capacitance between the gate and an effectivechannel. With the phrase “effective channel”, it is intended to mean aregion of the channel which restrictively regulates magnitude of acurrent flowing therethrough and which corresponds to a region ofhighest potential energy in the current path. Thus, this region may alsobe termed a bottle-neck region. In order to make use of theaforementioned hysteresis characteristic as the memory function, it isnecessary that the state in which the threshold value is high (V_(h))and the state where the threshold value is low (V_(l)) can definitelyand discriminatively be detected as a change in the drain current. Inother words, difference between the threshold values V_(h) and V_(l) hasto be clearly or definitely sensed in terms of a difference or changeappearing in the drain current. The conditions to this end can bedetermined in the manner described below. In general, the drain currentI_(d) of a MOS transistor having a threshold value V_(t) can berepresented in the vicinity of the threshold value by the followingexpression:

I _(d) =A·exp[q(V _(gs) −V _(t))/(kT)]  (2)

where A represents a proportional constant, q represents charge of anelectron, V_(gs) represents a gate-source voltage of the MOS transistor,V_(t) represents the threshold voltage, k represents Boltzmann'sconstant and T represents an operating temperature in degree Kelvin.Thus, when V_(t)=V_(h), the drain current is given by

I _(dh) =A·exp[q(V _(gs) −V _(h))/(kT)]  (3)

while when V_(t)=V_(l), the drain current is given by

I _(dl) =A·exp[q(V _(gs) −V _(l))/(kT)]  (4)

Thus, ratio between the drain currents in the state where V_(t)=V_(h)and the state V_(t)=V_(l) can be determined as follows:

I _(dl) /I _(dh) =exp[q(V _(h) −V _(l))/(kT)]  (5)

Thus, it can be appreciated that in order to make it possible todiscriminate the two states mentioned above from each other on the basisof the drain currents as sensed, it is necessary that the drain currentratio I_(dl)/I_(dh) as given by the expression (5) is not smaller thanthe base e (2.7) of natural logarithm at minimum, and for the practicalpurpose, the current ratio of concern should preferably be greater than“10” (ten) inclusive. On the condition that the drain current ratio isnot smaller than the base e of natural logarithm, the followingexpression holds true.

ΔV _(t)(=V _(h) −V _(l))>kT/q  (6)

Thus, from the expression (1), the following condition has to besatisfied.

Q _(s) /C _(gc) >kT/q  (7)

In order that the capture of a single electron can meet the currentsense condition mentioned above, it is then required that the followingcondition be satisfied.

q/C _(gc) >kT/q  (8)

From the above expression (8), it is apparent that in order to enableoperation at a room temperature, the gate-channel capacitance C_(gc)should not exceed 6 aF (where a is an abbreviation of “atto-” meaning10⁻¹⁸). Incidentally, in the case of the semiconductor element havingthe gate length on the order of 1 micron, the gate-channel capacitanceC_(gc) will amount to about 1 fF (where f is an abbreviation of “femto-”meaning 10⁻¹⁵) and deviate considerably from the above-mentionedcondition. By contrast, in the case of a semiconductor elementfabricated by incarnating the teaching of the invention, thegate-channel capacitance C_(gc) is as extremely small as on the order of0.01 aF, and it has thus been ascertained that a shift in the thresholdvalue which can be sensed is brought about by the capture of only asingle even electron at a room temperature.

Further, in the course of the experiment, the inventors have found thatby holding the gate-source potential difference V_(gs) between zero voltand the voltage level V_(g1), the immediately preceding threshold valuecan be held stably over one hour or more. FIG. 3 of the accompanyingdrawing shows the result of this experiment. More specifically, FIG. 3illustrates changes in the drain current as measured under the conditionindicated by a in FIG. 2 while holding the gate voltage to be constant.As can be seen in the figure, in the state of low threshold value, ahigh current level can be held, while in the state of high thresholdvalue, a low current level can be held. Thus, by making use of the shiftof the threshold value, it is possible to hold information or data,i.e., to store information or data, to say in another way. Further, bysensing the drain current in these states, it is possible to read outthe data. Namely, the state in which the drain current is smaller than areference value 13 may be read out as logic “1” data, while the state inwhich the drain current is greater than the reference value (13) may beread out as logic “0” (refer to FIG. 3).

On the other hand, data write operation can be effectuated bycontrolling the gate voltage. Now, description will be directed to thedata write operation. It is assumed that in the initial state, the gatevoltage is at the low level V_(g0). By sweeping the gate voltage in thepositive direction to the level V_(g1) the threshold voltage at is setthe high level V_(h). With this operation, logic “1” of digital data canbe written in the semiconductor element according to the invention.Subsequently, the gate voltage is swept in the negative direction to thezero volt level to thereby change the threshold voltage to the low levelV_(l). In this way, logic “0” of digital data can be written.

As will now be understood from the foregoing description, it is possibleto write, hold and read the data or information only with a singlesemiconductor element. This means that a memory device can beimplemented with a significantly smaller number of semiconductorelements per unit area when compared with the conventional memorydevice.

The semiconductor element according to the invention in which datastorage is realized by capturing or entrapping only a few electrons in astorage node (which may also be referred to as the carrier confinementregion or level node or carrier trap or carrier confinement trap,quantum confinement region or the like terms) can enjoy an advantagethat no restriction is imposed on the number of times the data can berewritten due to deterioration of the insulation film as encountered ina floating-gate MOSFET or restriction, if imposed, is relatively gentle.

It is however noted that in the case of the mode illustrated in FIGS.1A-1D for carrying out the invention, relative positional relationship(i.e., relative distance) between the carrier trap level serving for thecarrier confinement and the effective channel region serving as thecurrent path is rather difficult to fix, involving non-ignorabledispersions of the threshold value change characteristic among theelements as fabricated.

As one of the measures for coping with the difficulty mentioned above,there is proposed another mode for carrying out the invention such asone illustrated in FIGS. 10A and 10B of the accompanying drawings inwhich the carrier confinement region (24) surrounded by a potentialbarrier is provided independently in the vicinity of a channel region(21). With this structure, the dispersion mentioned above can bereduced.

From the stand point of performance stability of the semiconductorelement, it is preferred that dispersion of the voltage differenceΔV_(t) between the high threshold voltage V_(h) and the low thresholdvoltage V_(l) among the semiconductor elements as fabricated should besuppressed to a possible minimum.

Certainly, the condition given by the expression (1) can apply validwhen the capacitance C_(gt) between the gate region and the carrierconfinement region as well as the capacitance C between the carrierconfinement region and the channel region is sufficiently small. In theother cases than the above, the condition given by the followingexpression applies valid:

ΔV _(t) =q/(1+C _(gt) /C)C _(gc)  (9)

where C_(gc) represents capacitance between the gate region (22) and thechannel region (21), C_(gt) represents capacitance between the carrierconfinement region (24) and the channel (21).

In conjunction with the mode shown in FIGS. 1A-1D for carrying out theinvention, the inventors have found that the term C representing thecapacitance between the carrier confinement region and the channelregion in the expression (9) is most susceptible to the dispersionbecause the carrier confinement region is so implemented as to assumethe carrier trap level. In order that the potential difference ΔV_(t)mentioned above scarcely undergoes variation notwithstanding ofvariation in the capacitance C between the carrier confinement regionand the channel region, the capacitance C_(gt) between the gateelectrode and the channel region must be sufficiently smaller than thecapacitance C (i.e., C_(gt)<C).

Thus, according to another preferred mode for carrying out theinvention, it is proposed to set at a small value the capacitance C_(gt)between the gate electrode (22) and the carrier confinement region (24)by interposing a gate insulation film (23) of a great thickness whilesetting at a large value the capacitance C between the carrierconfinement region (24) and the channel region (21) by interposingtherebetween an insulation film (25) of a small thickness.

On the other hand, in conjunction with the holding of data in thecarrier confinement region (24), it is necessary to ensure stabilityagainst thermal fluctuations. At this juncture, let's represent byC_(tt) the total capacitance existing between the carrier confinementregion and all the other regions. In general, in the absolutetemperature (T) system, energy fluctuation on the order of kT (where krepresents Boltzmann's constant and T represents temperature in degreeKelvin) will be unavoidable. Accordingly, in order to hold the datastably, it is required that change of energy given by q²/2C_(tt) asbrought about by capturing a single electron is greater than thefluctuation mentioned above. To say in another way, the condition givenby the following expression will have to be satisfied.

q ²/2C _(tt) >kT  (10)

This condition requires that the total capacitance C_(tt) defined abovehas to be smaller than 3 aF inclusive in order to permit operation at aroom temperature.

In still another mode for carrying out the invention as illustrated inFIGS. 17A and 17B of the accompanying drawings, a thin semiconductorfilm structure (48) is formed interiorly of an insulation film (49, 50)which is interposed between the storage region (47) and the channelregion (46) with a view to reducing deterioration of the insulation film(49, 50).

Thus, in the semiconductor element implemented in accordance with theinstant mode for carrying out the invention, a potential barrierprovided by the thin film structure (48) is formed interiorly of theinsulation film (49, 50) so that the thin film structure (48) playseffectively a same role as the insulation film, while making it possibleto decrease the thickness of the insulation film in practicalapplications.

As can be seen in FIGS. 17A and 17B, the semiconductor thin film (48)provided internally of the insulation film (49, 50) has an energy levelshifted by the conduction band under the effect of the quantumconfinement effect in the direction thicknesswise of the semiconductorthin film and serves essentially as a potential barrier between thestorage region and a carrier supply region for the write/eraseoperations, the reason of which will be elucidated below.

Representing the film thickness of the semiconductor thin film by L,effective mass of the carrier in the thin film by n and Planck'sconstant by h, energy in the lowest energy state in quantum fluctuationof the carrier due to the confinement effect in the thicknesswisedirection can appropriately be given by the following expression:

h²/8 mL²  (11)

In order that the energy shift due to the quantum confinement effect ismade effective in consideration of the thermal energy fluctuation, thecondition given by the following inequality expression (12) is requiredto be satisfied.

h ²/8 mL ² >kT  (12)

In the light of the above expression (12), the thickness of thesemiconductor thin film (48) formed of silicon (Si) will have to besmaller than 9 nm inclusive in order that the barrier is effective at aroom temperature.

Thus, although there is a probability of the carrier existing in thesemiconductor thin film for a short time upon moving of the carriersbetween the channel region (46) and the carrier confinement region (47)via the insulation film (49, 50), the probability of the carriersstaying in the semiconductor thin film (48) for a long time is extremelylow. As a result of this, the semiconductor thin film (48) operates as atemporary passage for the carriers upon migration thereof between thechannel region (46) and the carrier confinement region (47), which meansthat the semiconductor thin film (48) will eventually serve as thepotential barrier because of incapability of the carrier confiningoperation.

With the structure described above, the semiconductor element canexhibit the barrier effect with the insulation film of a smallerthickness when compared with the semiconductor element in which theabove structure is not adopted. Thus, film fatigue of the insulationfilm (49, 50) can be suppressed. For further mitigating the filmfatigue, the semiconductor thin film (48) may be formed in a multi-layerstructure.

The structure in which the semiconductor thin film is provided in theinsulation film can enjoy a further advantage that the height of thepotential barrier between the carrier confinement region and the sourceregion can properly be set. Since the energy shift due to the quantumconfinement is determined in accordance with the size L of the carrierconfinement region, it is possible to adjust the height of the barrierby adjusting the film thickness in addition to the selection of the thinfilm material. In this connection, it should be noted that in thesemiconductor element of the structure known heretofore, the height ofthe barrier is determined only on the basis of the material constitutingthe insulation film.

The above other objects, features and attendant advantages of thepresent invention will more clearly be understood by reading thefollowing description of the preferred embodiments thereof taken, onlyby way of example, in conjunction with the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1D are views for illustrating a structure of a memoryelement according to a first embodiment of the invention, wherein FIG.1A is a top plan view, FIG. 1B is microphotographic view of a channelportion of the same FIG. 1C is a schematic perspective view illustratingan overall structure of the memory element, and FIG. 1D is a sectionalview of the same taken along a line C-C′ in FIG. 1C;

FIG. 2 is a view showing graphically measured values representing agate-source voltage dependency of a drain current of the memory elementaccording to the first embodiment of the invention;

FIG. 3 is a view showing experimentally obtained results forillustrating holding of data by the semiconductor element according tothe first embodiment after writing of logic “1” and “0”;

FIGS. 4A to 4C are views for illustrating changes of a band profile inthe vicinity of a channel region of the semiconductor element accordingto the first embodiment of the invention when gate voltage is increased;

FIGS. 5A to 5C are views for illustrating changes of a band profile inthe vicinity of a channel region of the semiconductor element accordingto the first embodiment of the invention when gate voltage is lowered;

FIG. 6 is a schematic circuit diagram showing a structure of a memory ICdevice according to the invention in which the memory elements eachhaving the structure shown in FIG. 1 are employed;

FIG. 7 shows a hysteresis characteristic expected to be exhibited by thememory device shown in FIG. 6;

FIG. 8 is an exploded perspective view showing schematically a structureof a semiconductor memory device according to the first embodiment ofthe invention in which a memory cell array is formed as stacked onperipheral circuits formed in a Si-substrate surface;

FIGS. 9A and 9B are sectional views for illustrating fabrication stepsof a semiconductor memory device according to the first embodiment ofthe invention;

FIGS. 10A and 10B are sectional views showing a structure of asemiconductor memory element according to a second embodiment of theinvention;

FIGS. 11A and 11B are enlarged views showing exaggeratedly a channelregion, a carrier confinement region and a gate electrode of the memoryelement according to the second embodiment of the invention, whereinFIG. 11A is a perspective view and FIG. 11B is a sectional view;

FIG. 12 is a view for illustrating graphically a gate-source voltagedependency of a drain current in the semiconductor memory elementaccording to the second embodiment of the invention;

FIGS. 13A to 13C are schematic diagrams for illustrating exaggeratedlychanges in potential distribution in the vicinity of a channel regionand carrier confinement region of a semiconductor memory element when agate voltage is increased;

FIGS. 14A to 14C are schematic diagrams for illustrating exaggeratedlychanges in potential distribution in the vicinity of a channel regionand carrier confinement region of a semiconductor memory element when agate voltage is lowered;

FIGS. 15A and 15B are sectional views showing a structure of asemiconductor memory element according to a third embodiment of theinvention;

FIGS. 16A to 16C are views showing a structure of a semiconductor memoryelement according to a fourth embodiment of the invention, wherein FIG.16A is a sectional view, FIG. 16B shows a section taken along a linea-a′ in FIG. 16A and FIG. 16C is a top plan view;

FIGS. 17A and 17B are views for illustrating a semiconductor memoryelement according to a fifth embodiment of the present invention whereinFIG. 17A is a sectional view of the same and FIG. 17B shows a potentialdistribution profile in the memory element;

FIG. 18 is a view showing a symbol representing a semiconductor memoryelement according to the invention;

FIGS. 18A, 18B and 18C are views for illustrating a memory cellaccording to a sixth embodiment of the invention, wherein FIG. 18A showsa circuit configuration of the memory cell, FIG. 18B shows voltagesapplied to a word wire and a data wire of the memory cell upon read andwrite operations, respectively, and FIG. 18C is a view for graphicallyillustrating dependency of a drain current on a gate-source voltage of asemiconductor element employed in the memory cell;

FIG. 19 is a circuit diagram showing circuit configuration of a readcircuit for the memory cell according to the sixth embodiment of theinvention;

FIG. 20 is a signal waveform diagram for illustrating timings at whichvarious signals are applied upon read operation;

FIGS. 21A and 21B are diagrams showing a circuit configuration of a4-bit memory cell array according to the sixth embodiment and a layoutthereof, respectively;

FIGS. 22A to 22C are views showing a memory cell set according to aseventh embodiment of the invention, wherein FIG. 22A shows a circuitconfiguration of the cell set, FIG. 22B shows voltages applied to amemory element thereof upon write and read operations, and FIG. 22Cgraphically illustrates characteristic of the memory element;

FIG. 23 is a circuit diagram showing a structure of a semiconductormemory device according to the seventh embodiment of the invention;

FIGS. 24A to 24E are circuit diagrams showing various configurations ofthe memory cell according to the invention;

FIGS. 25A to 25C are views for illustrating a memory cell according toan eighth embodiment of the invention, wherein FIG. 25A shows a circuitconfiguration of the memory cell, FIG. 25B shows voltages applied to aword wire and a data wire of the memory cell upon read and writeoperations, respectively, and FIG. 25C is a view for graphicallyillustrating dependency of a drain current on a gate-source voltage of asemiconductor element employed in the memory cell;

FIG. 26 is a circuit diagram showing circuit configuration of a readcircuit for the memory cell according to the eighth embodiment of theinvention;

FIGS. 27A and 27B are circuit diagrams showing versions of the memorycell circuit according to the eighth embodiment, respectively;

FIGS. 28A and 28B are a circuit diagram showing a configuration of afour-bit memory cell and a corresponding mask layout of the same,respectively;

FIGS. 29A to 29C are views for illustrating a memory cell according to aninth embodiment of the invention, wherein FIG. 29A shows a circuitconfiguration of the memory cell, FIG. 29B shows voltages applied to aword wire and a data wire of the memory cell upon read and writeoperations, respectively, and FIG. 29C is a view for graphicallyillustrating dependency of a drain current on a gate-source voltage of asemiconductor element employed in the memory cell;

FIG. 30 is a circuit diagram showing a read/write circuit according tothe ninth embodiment of the invention;

FIGS. 31A, 31B and 31C are views for illustrating a memory cellaccording to a tenth embodiment of the invention, wherein FIG. 31A showsa circuit configuration of the memory cell, FIG. 31B shows voltagesapplied to a word wire and a data wire of the memory cell upon read andwrite operations, respectively, and FIG. 31C is a view for graphicallyillustrating dependency of a drain current on a gate-source voltage of asemiconductor element employed in the memory cell;

FIG. 32 is a circuit diagram showing a read circuit according to thetenth embodiment of the invention;

FIG. 33 is a view showing a version of a memory cell according to thetenth embodiment; and

FIG. 34 is a block diagram showing a structure of a data processingapparatus in which a memory device according to the invention beemployed as a main memory.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Now, the present invention will be described in detail in conjunctionwith the preferred or exemplary embodiments thereof by reference to thedrawings.

Embodiment 1

Description which follows is directed to a field effect semiconductormemory element (FET memory element) according to an exemplary embodimentof the present invention. FIGS. 1A to 1D are views for illustrating astructure of a semiconductor memory element according to a firstembodiment of the invention, wherein FIG. 1C is a schematic perspectiveview illustrating an overall structure of the memory element, FIG. 1D isa sectional view of the same taken along the line C-C′ in FIG. 1C, FIG.1B is an enlarged microphotographic view showing a channel portion ofthe same, and FIG. 1A is a top plan view thereof. Referring to thefigures, a source 1 and a drain 2 are each constituted by a regionformed of n-type polycrystalline silicon and having a high impurityconcentration while a channel portion 3 is constituted by a regionformed of a non-doped polycrystalline silicon region. Each of the source1, the drain 2 and the channel 3 is realized in the form of a thin andfine wire of polycrystalline silicon. In the case of a memory devicemanufactured actually by the inventors of the present application, thechannel 3 is 0.1 μm in width and 10 nm, preferably 3.4 nm in thickness.Connected to the ends of the source 1 and the drain 2 are contacts 1Aand 2A of polycrystalline silicon, respectively, each of which has athickness greater than that of the source 1 and the drain 2, wherein thesource 1 and the drain 2 are connected to metallic wiring conductors viathe polycrystalline silicon contacts 1A and 2A, respectively. In thecase of a typical example of the memory element, each of thepolycrystalline silicon contacts 1A and 2A should preferably beimplemented with a thickness of 0.1 μm which is ten times as large asthat of the channel 3, because, if otherwise, polycrystalline siliconitself becomes insusceptible to etching upon forming contact holesdirectly in thin polycrystalline silicon. A gate electrode 4 is providedin such orientation as to intersect the channel region 3 through aninterposed gate insulation film 5. In the case of the instantembodiment, the film thickness of the gate electrode 4 is 0.1 μm. Thestructure mentioned above can best be seen from FIG. 1C.

Parenthetically, the polycrystalline silicon film constituting thechannel region 3 is wholly enclosed by a SiO₂-protection film 10 in thecase of the instant embodiment (see FIG. 1D). Because the dielectricconstant of silicon oxide (SiO₂) is about one third of that of silicon,capacitances of the channel region 3 and the gate electrode 4 can bereduced by enclosing them with the SiO₂-protection film 10 as mentionedabove. This is one of the reasons why the hysteresis characteristicelucidated hereinbefore can be realized at a room temperature.

In the case of the memory element according to the instant embodiment,the channel of polycrystalline silicon is formed by depositing amorphoussilicon (a-Si) in a thickness of 10 nm on a SiO₂-substrate andcrystallizing by heat treatment at a temperature of 750° C. In thisconjunction, it has been found that the thickness of amorphous silicon(a-Si) should preferably be in the order of 3.5 nm. A structure of achannel portion is shown in FIG. 1B. In the course of the heattreatment, silicon crystal grains in amorphous silicon growprogressively. However, when the size of the grain reaches the filmthickness, any further growth in the direction perpendicular to theplane of the film is prevented. At the same time, the rate of the graingrowth in the direction parallel to the film becomes retarded. As aconsequence, the grain size in the lateral direction (i.e., in thedirection parallel to the film surface) is substantially equal to thefilm thickness. For these reasons, the field-effect semiconductor memoryelement according to the instant embodiment of the invention featuresthat the grain size of polycrystalline silicon forming the channelregion is extremely small.

The small grain size mentioned above contributes to realization of smallcapacitance between the gate electrode and the channel region, thereason for which will be elucidated below. In the field effect elementnow under consideration, it is only a few current paths 6 having lowestresistance in the channel region 3 that a current can actually flowwithin a low-current range close to a threshold level (see FIG. 1A). Tosay in more concrete, the current flow takes place due to migration ortransfer of electrons from one to another crystals grain. In the case ofthe instant embodiment, the current path is extremely fine or thinbecause of a very small grain size as mentioned above. Consequently, theregion in which electrons exists is remarkably small when compared withwhole the channel region. For this reason, the capacitance C_(gc) whichis effective between the gate electrode and the effective channelportion (in the sense defined hereinbefore) is significantly small.

In the case of a semiconductor memory element actually fabricatedaccording to the instant embodiment, the gate-channel capacitance C_(gc)mentioned above was set at an extremely small value, e.g. 0.02 aF(atto-Farad), with a view to observing the effect of change in thethreshold value to a possible maximum extent. As a result of this, therange of voltages required for operation expanded to several ten volts.Of course, by setting the gate-channel capacitance C_(gc) at a greatervalue, e.g. 0.2 aF, the operation voltage range can be set to a range ofseveral volts usually employed in the conventional integrated circuit.To this end, the thickness of the gate insulation film 5 may bedecreased and/or the length or width of the gate electrode may beincreased, which can be realized without any appreciable technicaldifficulty.

In the case of the instant embodiment of the invention, the channel isformed of polycrystalline silicon. At this juncture, it should howeverbe mentioned that the hysteresis characteristic can be realized even ina conventional bulk MOSFET formed in a crystal silicon substrate if thegate-channel capacitance mentioned above can be made so small that theconditions mentioned previously can be satisfied. In that case, the bulkMOSFET can be made use of as a memory element. In this conjunction, itis however noted that in the case of a bulk MOSFET, the effects of thegrain mentioned above are absent. Besides, the lower side of the bulkMOSFET is covered with a Si-film having a high dielectric constant.Consequently, it is necessary to decrease the size of the bulk MOSFETelement when compared with the element having the channel formed ofpolycrystalline silicon. This in turn means that difficulty will beaggravated in manufacturing the bulk MOSFET memory element. However,because the bulk MOSFET has a greater mobility of carriers, it canhandle a large current and is suited for a high-speed operation, to anadvantage. As a further version, the hysteresis characteristic mentionedpreviously can be realized by using a MOSFET of SOI(Silicon-On-Insulator) structure as well. The SOI structure can beimplemented by growing monocrystalline silicon on an insulation film andby forming a MOSFET therein. Because the gate-channel capacitance of theSOI MOSFET can be made smaller than that of the bulk MOSFET, thehysteresis characteristic can be realized with a greater size whencompared With the bulk MOSFET.

The foregoing description has been made on the assumption that thechannel for migration of electrons is of n-type. It should however bementioned that similar operation can be accomplished by using holes.Further, other semiconductor material than silicon can be employed informing the channel region.

Additionally, it has been assumed in the foregoing description that thegate electrode 4 is located beneath the channel region 3. However,similar operation can be effectuated equally with such structure inwhich the gate electrode lies above the channel region. Besides, gateelectrodes may be provided above and beneath the channel, respectively,for realizing similar operation and effects as those mentionedpreviously. Furthermore, the gate electrode may be disposed at a sidelaterally of the channel region. Moreover, gate electrodes may beprovided at both sides of the channel, respectively.

Now, referring to FIG. 6, description will be made of an integratedmemory circuit which is comprised of the semiconductor elements of thestructure described above. FIG. 6 shows a structure of a memory ICdevice in which polycrystalline silicon memory elements each having thestructure shown in FIG. 1 are employed. In this conjunction, it isassumed that each of the semiconductor elements or the polycrystallinesilicon memory elements has such hysteresis characteristic asillustrated in FIG. 7. More specifically, it is presumed that when avoltage V_(w) is applied between the gate and the source, the memoryelement takes on logic “1” state (state of high threshold valuerepresented by V_(h)) while upon application of a voltage of −V_(w)between the gate and the source, the memory element assumes logic “0”state (low threshold state V_(l)). On the other hand, application of avoltage in a range of −V_(w)/2 to V_(w)/2 between the gate and thesource or between the gate and the drain, the threshold voltageundergoes no change. The characteristic illustrated in FIG. 7 iscomparable to that shown in FIG. 2 except that the threshold value islowered as a whole and can be realized by introducing a donor impurityin the channel region of the memory element upon manufacturing thereof.

Referring to FIG. 6, each of semiconductor memory elements MP1 to MP4 isconstituted by a semiconductor element according to the invention whichhas the structure shown in FIG. 1 and the hysteresis characteristicillustrated in FIG. 7. Each of the semiconductor memory elements has agate terminal connected to a word wire, a drain terminal connected to adata wire and a source terminal connected to the ground potential.

Operation for writing digital data in the integrated memory circuit isperformed through cooperation of a word wire driver circuit and a datawire driver circuit shown in FIG. 6 in a manner described below. Forwriting logic “1” in the memory element MP1, the potential on the wordwire 1 is set to a voltage level of V_(w)/2 with the potential of thedata wire 1 being set to −V_(w)/2, while the other word wires and datawires are set to zero volt. As a result of this, a voltage of V_(w) isapplied between the gate and the drain of the memory element MP1, whichthus takes on the logic “1” state (high threshold state). At this timepoint, all the other memory elements than the memory element MP1 areapplied with a voltage not higher than V_(w)/2. Accordingly, no changetakes place in the threshold voltage in these other memory elements. Onthe other hand, for writing logic “0” in the memory element MP1, thepotential on the word wire 1 is set to −V_(w)/2 with the potential onthe data wire 1 being set to V_(w)/2. Thus, the voltage of −V_(w) isapplied between the gate and the drain of the memory element MP1,whereby the memory element MP1 is set to logic “0” state (low thresholdstate V_(l)). At this time point, all the other memory elements than thememory element MP1 are applied with a voltage which is not higher than−V_(w)/2. Accordingly, no change can take place in the threshold valuein these other memory elements.

On the other hand, reading of information or data is carried out in amanner described below (see FIG. 6). In the data wire driver circuit,the data wire is connected to a voltage source via a load element. Onthe other hand, the other end of the data wire is connected to a senseamplifier. Now, operations involved in reading out data from the memoryelement MP1 will be considered. To this end, the potential of the wordwire 1 as selected is set to the level of zero volt while the potentialon the other word wire 2 not selected is set to the voltage level of−V_(w)/2. When the memory element MP1 is in the logic “1” state, thismeans that the memory element MP1 is in the off-state (i.e.,nonconducting state) with the data wire remaining in the logically highstate. Even when the memory element MP2 is in the logical “0” state, nocurrent can flow through the memory element MP1 because the word wirenot select is at the potential level of −V_(w)/2. When the memoryelement MP1 is in the logic “0” state, a current flows from the datawire 1 to the grounded wire via the memory element MP1, resulting inlowering of the potential at the data wire 1. This potential drop isamplified by the sense amplifier, whereupon the data read-out operationcomes to an end. The memory device can be implemented in this manner.

In the memory device now under consideration, peripheral circuitsthereof such as a decoder, the sense amplifier, an output circuit andthe like are implemented by using the conventional bulk MOSFET formed ina surface of a Si-substrate in such an arrangement as illustrated inFIG. 8, and a memory cell array including the memory elements MP1 to MP4each of the structure illustrated in FIG. 1 are fabricated on theperipheral circuits with an interposition of an insulation film. This isbecause polycrystalline silicon for the memory elements MP1 to MP4 canbe fabricated on the bulk MOSFETs. By virtue of this structure, thespace or area otherwise required for the peripheral circuits can bespared, whereby the memory device can be implemented with about twice ashigh an integration density when compared with that of the conventionaldynamic RAM. Parenthetically, it should be added that a wiring layerwhich exists in actuality between the bulk MOSFETs and thepolycrystalline silicon transistor layer is omitted from illustration inFIG. 8.

As will be appreciated from the foregoing description, with thestructure of the memory device according to the instant embodiment ofthe invention, there can be realized a integrated memory circuit with ahigh integration density because of capability of storing single-bitinformation by the single memory element. Besides, the integrationdensity can further be increased by stacking the memory cell array onthe peripheral circuit layer in a laminated or stacked structure.Additionally, there is no necessity for reading out a quantity ofelectric charge, as required in the case of the conventional dynamicRAM, but the signal can be generated on the data wire in a staticmanner, so to say. Owing to this feature, fine structurization canfurther be enhanced without involving degradation in the signal-to-noiseratio (S/N ratio). Moreover, information as stored can be retained overan extended time period, which means that refreshing operation asrequired in the case of the dynamic RAM can be rendered unnecessary.Consequently, power consumption can be suppressed to a possible minimum.Further, the peripheral circuits can be implemented in much simplifiedconfiguration. Owing to the features mentioned above, there can berealized according to the teachings of the invention incarnated in theinstant embodiment a semiconductor memory device with an integrationdensity which is at least twice as high as that of the conventionaldynamic RAM while the cost per bit can be reduced at least to a half ofthat required in the conventional dynamic RAM. Of course, electric powerrequired for holding or retention of information (data) cansignificantly be reduced.

In the foregoing description, it has been assumed that the low thresholdvoltage V_(l) is of negative polarity with the high threshold levelV_(h) being positive, as illustrated in FIG. 7. However, even when thesethreshold voltages V_(l) and V_(h) for the memory element are set athigher levels, respectively, similar operation can be ensured simply bysetting correspondingly higher the gate control signal level.

Next, by reference to FIGS. 9A and 9B, description will turn to aprocess for fabricating or manufacturing the memory element and thememory device according to the instant embodiment of the invention. Atfirst, an n-channel MOS 15 and a p-channel MOS 16 (i.e., a CMOS(Complementary Metal-Oxide Semiconductor device) are fabricated on asurface of a p-type Si-substrate 14, which is then followed by formationof an insulation film over the CMOS device as well as formation of metalwires 17 (refer to FIG. 9A). Subsequently, an inter-layer insulationfilm 18 is deposited and the surface thereof is flattened for reducingroughness. Next, a polycrystalline silicon region which is to serve as agate electrode 4 of the memory element is formed on the flat surface ofthe insulation layer 18. To this end, the polycrystalline silicon regionis doped with n-type impurity at a high concentration so that itexhibits a low resistance. Next, a SiO₂-film which is to serve as a gateinsulation film 5 is deposited in thickness on the order of 50 nm overthe insulation layer 18 having the gate electrodes through a chemicalvapor deposition method (i.e., CVD method in abbreviation), which isthen followed by deposition of an amorphous silicon layer. Afterpatterning of the amorphous silicon layer, source regions 1 and drainregions 2 are doped with n-type impurity such as As, P or the likethrough ion implantation and annealed at a temperature of about 750° C.,whereby channels 3 of polycrystalline silicon are formed. Finally, aprotection or passivation film 10 of SiO₂ is formed. Thus, there can befabricated a memory device of high integration density according to theinvention (refer to FIG. 9B). At this juncture, it should be added thatan electrically conducting layer may be provided on the top surface ofthe memory device for the purpose of shielding the memory device againstnoise to thereby enhance the reliability thereof.

Embodiment 2

FIGS. 10A and 10B are sectional views showing a memory element accordingto a second embodiment of the invention. An SOI(Silicon-On-Insulator)-substrate is employed as the substrate, whereinFIG. 10B shows a section taken along as line a-a′ in FIG. 10A. A sourceregion 19 and a drain region 20 are each constituted by an n-typesilicon region of high impurity concentration and low resistance,wherein a channel 21 of silicon extending between the source and drainregions 19 and 20 is formed in a fine or thin wire. A thin film 25 ofSiO₂ is formed over the channel 21. Further, a storage node 24 forconfining carriers with silicon grains is formed on the channel region21. A gate electrode 22 is provided above the channel region 21 with agate insulation film 23 being interposed therebetween.

With the structure of the memory element according to the instantembodiment, the capacitance C_(gc) between the channel region 21 and thegate electrode 22 can be reduced because of a very small wire width ofthe channel 21. Writing and erasing operations can be effected bychanging potential level. More specifically, the writing can be carriedout by injecting electrons from the channel region into the storage node24 by clearing a potential barrier provided by the insulation film 25,while for erasing the stored information, electrons are drawn out fromthe storage node 24. Thus, in the memory element according to theinstant embodiment, writing and erasure of or data information to andfrom the storage node 24 are performed by transferring the electronswith the channel. It should however be mentioned that these operationscan be realized through electron transferring with other region than thechannel region. The same holds true in the embodiments of the inventionwhich will be described below. Further, although silicon is employed forforming the source, the drain and the channel with SiO₂ being used forforming the insulation films in the memory element according to theinstant embodiment, it should be understood that the source and thedrain may be formed of other semiconductor material or metal and thatthe insulation film may also be formed with other compositions so longas the capacitance C_(gc) satisfying the requisite conditions mentionedpreviously can be realized.

Additionally, it is important to note that although the storage node 24is provided above the channel 21 in the memory element according to theinstant embodiment, the storage node 24 may be provided beneath thechannel region or at a location laterally of the channel region.Besides, although it has been described that the SOI substrate isemployed with monocrystalline silicon being used for forming the source,the drain and the channel, it should be understood that they may beformed by using polycrystalline silicon as in the case of the firstembodiment. In that case, difference from the first embodiment can beseen in that the storage node 24 is provided independently. It shouldfurther be added that the material for the insulation film interposedbetween the channel region and the storage node need not be same as thematerial of the insulation film interposed between the gate and thestorage node.

Although it is presumed that the carriers are electrons in the memoryelement and the memory device according to the instant embodiment, holesmay equally be employed as the carriers substantially to the sameeffect. This holds true in the embodiments described below as well.

According to the teachings of the invention incarnated in the instantembodiment, the storage node 24 is formed by using crystal grains of asmall size, wherein the storage node 24 of Si-grains is surrounded orenclosed by the gate insulation film 23 and the insulation film 25 ofSiO₂ to thereby reduce surrounding parasitic capacitance. Because of thesmall size of the grains constituting the storage node 24, thesurrounding or total capacitance C_(tt) therefor may be determined interms of intrinsic capacitance. In the case of a spherical body having aradius r and enclosed by a material having a dielectric constant ε, theintrinsic capacitance thereof is given by 4 πεr. By way of example, forthe storage node formed by silicon crystal grains having a grain size of10 nm, the surrounding or total capacitance C_(tt) of the storage nodeis about 1 aF.

FIGS. 11A and 11B show schematically and exaggeratedly a channel region,a carrier confinement node and a gate electrode in a perspective viewand a sectional view, respectively.

Referring to FIG. 12, when a gate-source voltage (i.e., voltage appliedbetween the gate and the source) is swept between a first voltage V_(g0)(zero volt) and a second voltage V_(g1) (5 volts) in the verticaldirection as viewed in FIG. 12, the drain current exhibits a hysteresischaracteristic. In this conjunction, relevant potential distributions onand along a plane b-b′ in FIG. 11B are illustrated in FIGS. 13A to 13Cand FIGS. 14A to 14C. The reason why the hysteresis characteristic suchas illustrated in FIG. 12 makes appearance will be elucidated below.

In the semiconductor memory element shown in FIG. 10, potentialdistribution making appearance in the channel region 21 when thepotential difference V_(gs) between the gate and the source is zero voltis schematically shown in FIG. 13A. This corresponds to the state 25shown in FIG. 12. Parenthetically, it is assumed that the drain currentflows in the direction perpendicular to the plane of the drawing FIG.13A. The description which follows will be made on the assumption thatthe drain-source voltage is sufficiently low as compared with the gatevoltage, being however understood that the following description appliesvalid as it is, even when the voltage between the drain and the sourceis high.

Now referring to FIG. 13A, in the channel region 21 surrounded by apotential barrier 25 formed between the channel region 21 and thestorage node 24 and the peripheral SiO₂-film 23, there prevails alow-energy potential. Thus, the storage node 24 (carrier confinementregion) formed of Si-grains and surrounded by the insulation films 23and 25 can capture or trap the carriers or electrons. On the other hand,no electrons exist in the channel region 21 because energy level of theconduction band in the channel region 21 of P-type or N-type having lowimpurity concentration or i-type (intrinsic semiconductor type) issufficiently higher than the energy level of the conduction band in theN-type source 19 of a high impurity concentration or Fermi level in theN-type degenerate source region 19 having a high impurity concentration.Consequently, no drain current can flow.

Incidentally, energy in the carrier confinement region or the storagenode 24 is sufficiently higher than the Fermi level in the source region19. Thus, no electron exists in this region 24 either.

As the potential difference V_(gs) between the gate electrode 22 and thesource 19 is increased from zero volt to the low threshold voltageV_(l), potential in the channel region 21 increases. As a consequence,potential in the channel region 21 for electrons becomes lower, as canbe seen in FIG. 13B, hereby electrons are introduced into the channelregion 21 from the source 19. Thus, a current flow takes place betweenthe source and the drain.

When the gate voltage is further increased, the number of electronsexisting in the channel region 21 increases correspondingly. However,when the gate-source voltage V_(gs) reaches a writing voltage V_(g1),energy in the storage node 24 becomes low, being accompanied with acorresponding increase of the potential gradient between the channel 21and the storage node 24. As a consequence of this, at least one electronwill be entrapped in the storage node 24 by clearing the potentialbarrier 25 due to thermal energy distribution of electron and/ortunneling phenomenon (tunnel effect). This corresponds to transitionfrom the state 27 to the state 28, as illustrated in FIG. 12.

Thus, there takes place a Coulomb blockade owing to one electron trappedin the storage node 24 as well as potential increase, whereby injectionof another electron in the storage node 24 is prevented, as isillustrated in FIG. 14A.

In this way, every time one electron is entrapped in the storage node24, the threshold voltage of the semiconductor memory element shown inFIG. 10 changes from the low threshold V_(l) to the high thresholdvoltage V_(hs), the reason for which will be explained below.

When the gate-source voltage V_(gs) is lowered within the range of V_(h)(high threshold voltage)<V_(gs)<V_(l) (low threshold voltage), startingfrom the state illustrated in FIG. 14A, the number of electrons in thechannel region 21 decreases. However, electron captured or trapped inthe storage node 24 remains as it is, because of existence of thepotential barrier 25 between the storage node 24 and the channel 21.

When the voltage of the gate electrode 22 is lowered to a level wherethe potential difference V_(gs) is equal to the high threshold voltageV_(h), the Fermi level in the source 19 becomes different from theenergy level of the conduction band in the channel 21 by a magnitude onthe order of kT, as a result of which substantially all of the electronsin the channel region make disappearance, (refer to FIG. 14B). Thiscorresponds to the state 29 shown in FIG. 12. At this juncture, itshould however be mentioned that the threshold value V_(h) at which thedrain current can no more flow becomes higher than the low thresholdvoltage V_(l) by an amount of the charge of the electrons captured inthe storage node 24.

As the gate-source voltage V_(gs) is further lowered to a level where itbecomes equal to zero volt, the potential gradient between the storagenode 24 and the channel region 21 becomes steeper correspondingly, as aresult of which the electron captured in the storage node 24 is releasedowing to the tunneling effect brought about by thermal energydistribution of electrons and the field effect (refer to FIG. 14C).Potential profile in the state where electrons are dispelled isequivalent to the initial potential profile illustrated in FIG. 13A.This means that the semiconductor memory element resumes the state 25shown in FIG. 12.

Subsequently, when the gate-source voltage V_(gs) is again increased foreffecting repeatedly the sweep in the vertical direction, hysteresisphenomenon which accompanies the capture/release of electron can beobserved.

In the structure of the memory element now under consideration, thecondition given by the expression (8) has to be satisfied in order todetect the presence/absence of a single electron in terms of a current.

Next, description will turn to a method of fabricating the memoryelement or memory device according to the instant embodiment of theinvention. As is shown in FIGS. 10A and 10B, the source region 19, thedrain region 20 and the channel region 21 are formed in the SOIsubstrate by resorting to a photoetching process. The channel region isrealized in the form of a fine or thin wire. The source and drainregions are doped with n-type impurity at a high concentration. Bycontrast, the channel region is doped with n-type or i-type or p-typeimpurity at a low impurity concentration. Subsequently, the SiO₂-film 25is deposited through a CVD (chemical vapor deposition) process, which isthen followed by formation of a crystal silicon grain or the storagenode 24 through a CVD process.

In order to form the silicon crystal grain 24 (which is to serve as thestorage node 24) having a very small radius r, a nucleus formedinitially in the CVD deposition process is made use of for forming thecrystal silicon grain 24. To this end, formation of the crystal silicongrain 24 by the CVD method should be carried out at a low temperatureand completed within a short time.

Embodiment 3

FIGS. 15A and 15B show in sections a memory element according to a thirdembodiment of the present invention, respectively, in which FIG. 15B isa sectional view taken along a line a-a′ in FIG. 15A. The memory elementor memory device according to the instant embodiment differs from thesecond embodiment in that the former is implemented in such a structurein which a channel region 33 and a carrier confinement region or storagenode 34 are sandwiched between a pair of gate electrodes 31 and 32.Thus, in the memory element or memory device according to the instantembodiment, writing and erasing operations can be performed not onlyfrom the first gate electrode 31 but also through the medium of thesecond gate electrode 32.

In the case of memory element or memory device according to the secondembodiment of the invention, it is expected that potential profiles inthe carrier confinement region and in the vicinity of the channel regioninclusive thereof may undergo variation under the influence of change inthe external potential. By contrast, the memory element or memory deviceaccording to the instant embodiment is less susceptible to the influenceof such external potential change owing to the shielding effect of thegate electrodes provided at both sides, to an additional advantage.

Embodiment 4

FIGS. 16A to 16C show a memory element according to a fourth embodimentof the invention, wherein FIG. 16A is a sectional view, FIG. 16B shows asection taken along a line a-a′ in FIG. 16A and FIG. 16C is a top planview. Referring to the figures, formed over a channel region 39 of abulk MOSFET in which a source 35 and a drain 36 are formed in a siliconsemiconductor crystal substrate is an insulation film 40 on which aplurality of silicon crystal grains 41 are formed. Further, aninsulation film 42 is formed over the insulation film 40 and the grains41. Additionally, a second gate electrode 38 is deposited on theinsulation film 42. This gate electrode 38 is of such a shape that a gapexists in the direction interconnecting the source 35 and the drain 36.A first gate electrode 37 is provided above the second gate electrode 38with an insulation film 43 being interposed therebetween. The source 35and the drain 36 are each constituted by a region formed of an n-typebulk silicon having a high impurity concentration, wherein a p-typeregion 44 intervenes between the source region 35 and the drain 36.

By applying a voltage of positive or plus polarity to the first gateelectrode 37, electrons are induced in a surface portion of the p-typeregion 44, whereby a channel 39 is formed. In that case, the potentialof the second gate electrode 38 is set lower than the first gateelectrode 37 so that the second gate electrode 38 also operates as anelectrostatic shield electrode. As a result of this, the channel region45 is formed only in a region located in opposition to the fine gap ofthe second gate electrode 38, whereby the effective capacitance C_(gc)between the first gate electrode 37 and the channel region 39 can bemade smaller. Writing and erasing operations can be realized by changingthe potential of the first gate electrode 37 or the second gateelectrode 38 or the substrate 37 in a substantially same manner asdescribed hereinbefore in conjunction with the third embodiment.

Embodiment 5

FIG. 17A shows a cross section of a memory element according to a fifthembodiment of the present invention. The direction in which the currentflows extend perpendicularly to the plane of the drawing. The channelregion and the carrier confinement region (storage node) as well asregions located in the vicinity are shown exaggeratedly. The source andthe drain are implemented in same configurations as those of the memoryelement according to the second embodiment of the invention. The instantembodiment differs from the second embodiment in that a thin film 48 ofsilicon is formed in SiO₂-insulation films 49 and 50 between a channelregion 46 of silicon and a storage node (carrier confinement node) 47formed by a silicon crystal grain.

Carriers within a channel 46 can reach the storage node (carrierconfinement region) 47 via the Si-thin film 48. FIG. 17B shows apotential profile in the memory element of the structure mentionedabove. Referring to FIG. 17B, an energy shift 52 takes place in theSi-thin film 48 due to the quantum confinement effect in the directionthicknesswise. The thin Si-film 48 plays a role as a barrier for themigration of electron from the Si-channel region 46 to the carrierconfinement region (storage node) 47. As a result of this, for achievingthe same barrier effect, the sum of film thicknesses of the SiO₂-films49 and 50 existing between the channel and the carrier confinementregion may be reduced as compared with the film thickness of the Si0₂-film located between the channel region and the carrier confinementregion of the memory element in which the structure according to theinstant embodiment is adopted (e.g. refer to FIGS. 10A and 10B).Accordingly, fatigue of the insulation film can be mitigated, wherebythe number of the times the memory is rewritten can be increased.

It should further be mentioned that the potential barrier realized bymaking use of the quantum confinement effect described above iseffective for protecting the insulation film against fatigue even in thecase where a greater number of carriers are to be handled by the carrierconfinement region.

Embodiment 6

A structure of a memory read circuit for a semiconductor memory deviceaccording to the invention will be described by reference to FIGS. 18Ato 18C and FIG. 19. In the description which follows, the semiconductormemory element according to the invention which may be one of theelements described hereinbefore by reference to FIGS. 1A-1D, FIG. 6,FIGS. 10A, 10B, FIGS. 15A, 15B, FIGS. 16A-16C and FIGS. 17A, 17B,respectively, is identified by representing the carrier trapping node(carrier confinement region) by a solid circle as shown in FIG. 18 forthe purpose of discrimination from the conventional field effecttransistor. On FIGS. 18A to 18C, FIG. 18A shows a circuit configurationof a single-bit memory cell, FIG. 18B shows voltages applied to a wordwire W and a data wire D upon read and write operations, respectively,and FIG. 18C graphically illustrates a dependency of a drain current ona gate voltage (gate-source voltage) in a semiconductor element MM7employed for realizing the memory cell. The circuit configuration per seis identical with that described hereinbefore in conjunction with thefirst embodiment by reference to FIG. 6.

FIG. 19 shows a circuit configuration for reading data or informationstored in a memory cell MM1. Needless to say, a large number of memorycells similar to the memory cell MM1 are disposed in an array in thememory device which the invention concerns, although illustrationthereof is omitted. The memory cell MM1 serving for storing informationdiffers from the conventional MOSFET known heretofore in that the valueof a current which can be handled by the memory cell is smaller ascompared with that of the MOSFET. This is because the gate-channelcapacitance is set small in the case of the memory cell according to theinvention. A structure for reading such a small current value stably ata high speed will be described below. The memory cell constituted by thesemiconductor memory element MM1 is connected to a data wire D which inturn is connected to an input transistor M9 constituting a part of adifferential amplifier via a data wire selecting switch M5. Connected toanother data wire Dn provided in pair with the data wire D are dummycells constituted by semiconductor memory elements MM5 and MM6,respectively. The data wire Dn is connected to a gate terminal of aninput transistor constituting the other part of the differentialamplifier via a data wire selecting switch M6.

Now, description will be directed to operation for reading data from thememory cell MM1. FIG. 20 shows timing of signals involved in the readoperation. It is assumed that logic “0” is written in the memory cellMM1 which is thus in the state where the threshold voltage is low. Eachof the dummy cells MM5 and MM6 is always written with logic “0”previously. Upon read operation, a signal S2 is set to a low level tothereby precharge both the data wires D and Dn to a source voltageV_(r). At the same time, signals S3 and S4 are set to a high level tothereby allow the data wires D and Dn to be connected to the inputtransistors M9 and M10 of the differential amplifier, respectively.Further, at the same timing, signals S5 and S6 are set to the high levelto thereby activate the differential amplifier so that the outputs OUTand OUT_(n) are equalized to each other. By changing potentials of theword wire W1 and WD from the low level to the high level, the memorycell MM1 and the dummy cells MM5 and MM6 are selected. Then, the memorycell MM1 assumes the on-state (conducting state), which results in thatthe potential of the data wire D becomes low. At the same time, thedummy cells MM5 and MM6 are set to the on-state, whereby the potentialof the data wire Dn becomes low. However, because the dummy cells MM5and MM6 are connected in series, the current driving capability thereofis poor as compared with that of the memory cell MM1. Consequently, thepotential of the data wire Dn changes more gently than that of the datawire D. When data of the data wires D and Dn are fixed, a signal S6 isset to the low level, whereby the differential amplifier can assume thestate ready for operation. The potential difference between the datawires D and Dn is amplified by the differential amplifier, the outputOUT of which thus assumes the high level while the other output OUTnbecomes low. At this time point, operation for reading logic “0” fromthe memory cell MM1 is completed.

When the memory cell MM1 is in the state of logic “1” (i.e., in thestate where the threshold value is high with only a small currentflowing), the data wire D remains in the precharged state, as a resultof which the potential of the data wire Dn lowers more speedily thanthat of the data wire D. The resultant difference is then amplified bythe differential amplifier, whereupon the read operation comes to anend.

For reading information from the memory cell constituted by asemiconductor memory element MM2, the semiconductor memory elements MM3and MM4 then serve as the dummy cells. It is sufficient to provide asingle dummy cell for each of the data wires. Thus, the area requirementcan be suppressed to a minimum.

With the circuit arrangement described above, information read operationcan be effectuated even when only a small potential difference makesappearance between the data wires D and Dn. This means that the quantityof charge to be discharged from the data wire D via the memory cell MM1may be small. By virtue of these features, high-speed operation can berealized.

In the case of the exemplary embodiment described above, the seriesconnection of the dummy cells MM5 and MM6 is provided as the means formaking the dummy cell current substantially equal to a half of thememory cell current. However, the reference potential can be generatedby reducing the channel width to a half or lowering the applied gatevoltage instead of resorting to the provision of the serial dummy-cellconnection.

FIGS. 21A and 21B show a circuit configuration of memory cells in asemiconductor memory device and a layout thereof, respectively. Morespecifically, FIG. 21A is a circuit diagram showing four memory cellsarrayed adjacent to one another, while FIG. 21B shows a mask layoutcorresponding to the circuit configuration shown in FIG. 21A. The twomemory cells MM91 and MM92 connected to a word wire W91 share one andthe same gate electrode in common, whereby the wiring required, ifotherwise, can correspondingly be spared. On the other hand, for theother memory cells MM93 and MM91 which are connected to a same data wireD91, diffused layers thereof are directly connected to each other forallowing a single contact (CT) to be shared by both the memory cellsMM93 and MM91, whereby the wiring area as required is correspondinglyreduced.

Embodiment 7

Another embodiment of the semiconductor memory device according to theinvention will be described by reference to FIGS. 22A to 22C and FIG.23. With the structure of this embodiment, the read operation can becarried out at a higher speed than the semiconductor memory deviceaccording to the sixth embodiment.

Of these drawings, FIG. 22A shows a circuit diagram of a cell setcomprised of an assembly of plural memory cells MM51, MM52 and MM53which are connected to the same sub-data wire D, FIG. 22B shows voltagesapplied to the memory element MM51 upon write and read operations, FIG.22C graphically illustrates characteristic of the memory element MM51,and FIG. 23 shows a structure of a semiconductor memory deviceimplemented by using the cell sets each of a structure shown in FIG.22A. The instant embodiment differs from the sixth embodiment primarilyin that the data wire is hierachized into a main data wire MD 51 and asub-data wire D (see FIG. 23) in order to carry out read operation at ahigher speed. As can be seen in FIG. 22A, the source terminals of thememory cells MM51, MM52 and MM53 are connected to the sub-data wire D,which in turn is connected to a preamplifier comprised of transistorsM53 and M52 and generally denoted by PA51. The preamplifier PA51 has anoutput terminal connected to a main data wire MD 51 (see FIG. 23).Connected to the main data wire MD 51 are a plurality of cell sets eachof the structure mentioned above via the respective preamplifiers. Themain data wire MD 51 is connected to one of the input terminals of amain amplifier MA51 constituted by a differential amplifier. A column ofdummy cells is constituted by cell sets disposed in an array. The dummycell (e.g. MM54) is connected to another main data wire MD 52 via apreamplifier PA52. The main data wire MD 52 in turn is connected to theother input terminal of the main amplifier MA51. The preamplifier PA52for the dummy cell set is so designed that the current drivingcapability thereof approximately corresponds to a half of that of thepreamplifier PA51. This can be realized, for example, by diminishing thechannel width of the transistor to the half.

Next, description will turn to operation for reading information from amemory cell MM51. Information of logic “0” is written in the dummy cellMM54 previously. It is first assumed that information of logic “0” isstored in the memory cell MM51. At first, high-level potential V_(r) isapplied to a gate terminal S52 of the transistor M51 to thereby set thesource terminal S51 to the ground potential level, whereby the sub-datawire D is set to the ground potential level. Further, for the selectionof cell set, high-level potential is applied to the gate terminal S53 tothereby set the transistor M52 of the preamplifier PA51 to theconducting state (on-state). At the same time, the main data wires MD 51and the MD 52 are precharged to the high potential level V_(r). When thepotential of the word wire W changes from a low level to a high levelV_(r), the memory cell MM51 becomes conductive, whereby the subdata wireD is charged from a source terminal P (=V_(r)) via the memory cell MM51.Consequently, the transistor M53 is turned on, which results in that themain data wire MD 51 is discharged through the memory cells MM52 andMM53 with the potential of the main data wire MD 51 being lowered.Through similar operation, the dummy cell MM54 connected to the sameword wire assumes the on-state. In response, the preamplifier PA52operates to cause the main data wire MD 52 to be discharged. Thus, thepotential of the main data wire MD 52 is lowered. However, because thecurrent driving capability of the preamplifier PA52 is poor as comparedwith that of the preamplifier PA51, the potential of the main data wireMD 52 is lowered at a slower rate than that of the main data wire MD 51.Thus, there makes appearance between the main data wires MD 51 and MD 52a potential difference, which is detected by the main amplifier MA51,whereby corresponding output information is derived from the mainamplifier MA51. Operation for reading out logic “1” is carried out inthe similar manner.

In the case of the instant embodiment, it is sufficient for the memorycell MM51 only to drive the sub-data wire D. The sub-data wire featuresthat the parasitic capacitance is small, because the number of the cellsconnected to the sub-data wire is as small as in a range of 8 to 32 andbecause the length of the sub-data wire is short. Thus, the sub-datawire can be driven by the memory cell or memory element MM51 at a highspeed. Equally, high-speed operation of the main data wire MD 51 can beachieved because it can be driven at a high speed by the preamplifierPA51.

According to the teaching of the invention incarnated in the instantembodiment, the preamplifiers PA52 and PA51 are so implemented that theydiffer in respect to the current driving capability for the purpose ofgenerating a reference voltage for the differential amplifier PA51. Whencompared with the sixth embodiment in which the current is reduced to ahalf by the memory cell per se, the instant embodiment according towhich the current level is changed in the preamplifier constituted bythe transistors of higher rating is advantages in that it is lesssusceptible to the influence of the dispersions mentioned hereinbefore.

Parenthetically, the main amplifier MA51 can be implemented by using anappropriate one of various circuits known in the art such asdifferential amplifier employed in the device of the sixth embodiment, acurrent-mirror type differential amplifier circuit and the like.

In the case of the sixth and seventh embodiments described above, it hasbeen assumed that the memory cell is constituted by a single transistor.It should however be mentioned at this juncture that the memory cell maybe implemented in other configurations such as exemplified by thoseshown in FIGS. 24A to 24E. More specifically, FIG. 24A shows a memorycell in which a back gate is provided in opposition to the gateelectrode with the channel being interposed between the back gate andthe gate electrode. This structure of the memory cell provides anadvantage that when a plurality of memory cells are connected to a sameback gate terminal, information or data contained in these memory cellscan simultaneously be set to logic “0” by applying a voltage of minuspolarity to the back gate. Of course, by applying a voltage of plus orpositive polarity to the back gate, it is equally possible to writesimultaneously logic “1” in these memory cells.

In this junction, the back gate terminal may be realized by making useof the semiconductor substrate itself, a potential well or the like.

FIG. 24B shows a memory cell in which the terminal wire P extends inparallel with the word wire so that control of the memory device can beperformed on a row-by-row basis independently. On the other hand, FIG.24C shows a memory cell in which the terminal wire P extends in parallelwith the data wire. Further, FIG. 24D shows a memory cell in which thegate of the memory element MM73 is connected to the data wire. In thiscase, the terminal P can be spared, which contributes to reduction ofthe area as involved in implementing the semiconductor memory device.Finally, FIG. 24E shows a memory cell in which the gate of the memoryelement MM74 is connected to the word wire and which thus can ensure anadvantage similar to that of the memory cell shown in FIG. 24D.

Embodiment 8

FIGS. 25A to 25C and FIG. 26 show a semiconductor memory deviceaccording to an eighth embodiment of the invention. As can be seen inFIG. 25A, the memory cell of the memory device according to the instantembodiment is constituted by a circuit including a memory element MM21according to the invention and a switching FET (field-effect transistor)M25 which are connected in series. More specifically, the word wire isconnected to the gate of the switching FET M25 so that the voltageapplied to the memory element MM21 from the data wire D can beinterrupted by the switching FET M25. Thus, necessity for applying avoltage to non-selected memory cells which shares the word wire or thedata wire with the selected memory cell can be obviated. This in turnmeans that the device according to the instant embodiment is excellentover the sixth and seventh embodiments in respect to the data holdcharacteristic, to an advantage.

Writing operation for the memory cell according to the instantembodiment is performed in a manner described below. First, operationinvolved in writing logic “0” will be considered. Applied to the wordwire to be selected is a voltage of (V_(cc)+V_(t)) while the potentiallevel of zero volt is applied to the data wire to be selected. As aresult, the switching FET M25 is turned on, whereby a node N21 assumesapproximately the ground potential level. Since the source terminal P isat a voltage level of V_(cc)/2, a voltage of −V_(cc)/2 is applied acrossthe gate and the source of the memory element MM21, whereby informationof logic “0” is written in the memory cell (refer to FIG. 25C). Next,operation for writing logic “1” is considered. Also in this case, thevoltage of (V_(cc)+V_(t)) is applied to the word wire while applying thevoltage V_(cc) to the data wire. Thus, the voltage V_(cc)/2 is appliedbetween the gate and the source of the memory element MM21, wherebylogic “1” is written in the memory cell (refer to FIG. 25C).

The operation for reading data or information from the memory cellaccording to the instant embodiment can be carried out by the means ofthe similar to those adopted in the sixth and seventh embodiments.However, in connection with the instant embodiment, the inventionteaches an arrangement which allows the read/write operation to beperformed at a lower source voltage. Referring to FIG. 26, for readingout information from the memory cell comprised of the memory element M25and the switching FET MM21, the potential level of the word wire W21 ischanged to the source voltage level V_(cc) from the ground potentiallevel, and at the same time the potential of the word wire WD22 of thedummy cell comprised of a switching FET M27 and memory elements MM25 andMM26 is changed from low level to high level. Succeeding operation isthe same as that of the sixth embodiment except that after the output isfixed, rewriting is performed for the memory cell by a writing driverconnected to the output of the sense amplifier. By way of example, whenlogic “1” is to be written in the memory element MM21, the voltageV_(cc) is applied to the data wire D. In that case, a voltagesubstantially equal to V_(cc) is applied across the gate and the sourceof the memory element MM21, whereby logic “1” can be written in thememory element MM21. On the other hand, when logic “0” is to be written,the data wire is set to the ground potential level. Thus, the voltage of−V_(cc)/2 is applied between the gate and the source of the memoryelement MM21, whereby logic “0” is written in the memory cell.

In the memory device according to the instant embodiment, every time thedata read operation is performed, rewriting operation is carried out insuccession. By virtue of this arrangement, inversion of the informationor data held by the memory element MM21 from logic “0” to logic “1” willpresent no problem so long as such inversion takes place only after thepotential difference of such a magnitude which enables the readoperation has occurred between the data wire D and the dummy data wireDn. Thus, the read voltage V_(r) and the write voltage V_(cc)/2 can beset at values or levels which are relatively close to each other. Thisin turn means that the write voltage can be set at a low level. By wayof concrete example, the read voltage V_(r) may be set at 3 volts withthe write voltage V_(cc)/2 being set at 4 volts. By contrast, in orderto ensure positively prevention of the information or data inversionfrom occurrence in the read operation as described hereinbefore inconjunction with the seventh embodiment (see FIG. 22C), the writevoltage V_(p) has to be set at about three times as high as the readvoltage V_(r). This necessitates application of a high voltage for thewrite operation.

FIGS. 27A and 27B are circuit diagrams showing versions of the memorycell circuit according to the instant embodiment, respectively. Thememory cell shown in FIG. 27A differs from the one shown in FIG. 25A inthat a source terminal P is connected to the gate of the memory elementMM81. On the other hand, in the memory cell shown in FIG. 27B, the gateof the memory element MM82 is controlled by a control signal C suppliedexternally of the memory cell.

FIGS. 28A and 28B show a circuit configuration and a layout of asemiconductor memory device including a number of memory cells each ofthe structure shown in FIG. 27A which corresponds to four bits. In thesefigures, the memory cells MM101 to 104 are each constituted by thepolycrystalline silicon memory element described hereinbefore inconjunction with the first embodiment. As can be seen from FIG. 28B, theword wires for the adjacent memory cells are constituted by one and thesame electrode, while a contact is shared in common by the two adjacentmemory cells and connected to the data wire. It will thus be understoodthat the area required for implementation of the memory cell cansignificantly be decreased.

Embodiment 9

FIGS. 29A to 29C show a memory cell circuit and a read circuit accordingto a ninth embodiment of the invention. More specifically, FIG. 29Ashows a circuit diagram of a memory cell according to the instantembodiment, FIG. 29B shows voltages as applied upon read and writeoperations performed for the memory cell, and FIG. 29C graphicallyillustrates characteristics of memory elements MM31 and MM32 employed inthe memory cell. A feature of the memory cell according to the instantembodiment of the invention resides in that complementary information ordata are written in the memory elements MM31 and MM32. Morespecifically, for writing logic “1”, a voltage of V_(cc) is applied tothe word wire W while a voltage of V_(e) (of negative polarity) isapplied to the data wire D, as a result of which a switching FET M33 isturned on, whereby the potential of the data wire D is applied to a nodeN31 which thus assumes the potential level V_(e). Since the voltageV_(e) is applied between the gate and the source of the memory elementMM32, the latter is set to a low threshold state. In contrast, a voltageof (V_(cc)−V_(e)) is applied between the gate and the source of thememory element MM31, which thus assumes a high threshold state. Forwriting logic “0” in the memory cell, the data wire D is set to thewrite voltage level V_(p). As a result of this, the memory element MM31assumes the low threshold state with the memory element MM32 in the highthreshold state. In succession to the write operation, the potentiallevel of the data wire is set to V_(cc)/2, which results in applicationof voltage of about V_(cc)/2 between the gates and the sources of thememory elements MM31 and MM32, respectively. In the logic “1” state, thedata wire D tends to discharge, while in the state of logic “0”, thedata wire D is charged. This trend or state is detected by thedifferential amplifier for reading the data or information, as can beseen in FIG. 30.

In the memory cell according to the instant embodiment of the invention,the potential level of the data wire lowers or rises in dependence onwhether the information or data of the memory cell to be read out islogic “1” or “0”. Accordingly, it is possible to apply directly thereference voltage (V_(cc)/2) to one of input terminals of thedifferential amplifier. For this reason, no dummy cell is required, toan advantage. In this conjunction, it should be recalled that in thecase of the circuit configurations according to the embodimentsdescribed hereinbefore, the dummy cells have to be provided because itis indefinite whether the potential level of the data wire is maintainedor lowered in dependence on whether the memory cell data is logic “1” or“0”.

Embodiment 10

Description will now turn to a memory cell circuit according to afurther embodiment of the invention by reference to FIGS. 31A to 31C, inwhich FIG. 31A shows a memory cell circuit for a single bit according tothe instant embodiment of the invention, FIG. 31B shows voltages forread and write operations, respectively, and FIG. 31C graphicallyillustrates characteristics of the memory elements MM41 and MM42. In thememory cell according to the instant embodiment, such arrangement isadopted that a pair of memory cells each of the structure shown in FIG.27A can be selected by means of one and the same word wire. To this end,memory elements MM41 and MM42 are adapted to store information or datawhich are complementary to each other. Namely, when the memory elementMM41 is set to a low threshold state, the memory element MM42 is set toa high threshold state, and vice versa. Consequently, when the word wireis set to a high potential level after the write operation, there makesappearance between the data wires D and Dn a potential differencereflecting a difference in the current driving capability between thememory elements MM41 and MM42. Thus, by connecting the data wires D andDn to a pair of input terminals of a differential amplifier, it ispossible to read information or data stored in the memory cell.

In the memory cell or memory device according to the instant embodimentof the invention, stable operation can be ensured without need forprovision of the dummy cell as well as need for generation of thereference potential level for the differential amplifier. Thus, thecircuit design can be simplified. Parenthetically, similar advantage canbe assured by using a memory cell circuit shown in FIG. 33.

In the foregoing description of the exemplary embodiments, it has beenassumed that an n-channel gate insulated field effect transistor isemployed as the switching element. It goes, however, without saying thatit may be replaced by other type of switching element. By way ofexample, a p-channel field effect transistor may be employed. In thatcase, the polarity of the voltage applied to the gate electrode must ofcourse be inverted.

Besides, in the foregoing description, it has been assumed that thesemiconductor memory element is of n-channel type. It is however obviousthat the memory element as well as the memory device can be implementedby using p-channel memory element (i.e., element capable of operatingwith holes).

Embodiment 11

The semiconductor memory devices or simply the memories describedhereinbefore in conjunction with the sixth to tenth embodiments featurethat information or data can be held without being volatilized. Thus,the time taken for data write operation is extremely short when comparedwith the conventional non-volatile memory, and no limitation is imposedto the number of times the rewriting operation is performed. Further,because the writing operation is completed by injecting only a fewelectrons, the writing operation of a very high speed can be achieved.The reason why no limitation is imposed on the number of times for thewriting operation can be explained by the fact that the writing isrealized by the move of a few electrons.

The memory devices according to the invention can very profitably beemployed as a main memory of a microprocessor in a data processingsystem such as shown in FIG. 34. Since the memory device according tothe instant embodiment is nonvolatile, information stored once in thememory device can be held even after a source power supply isinterrupted. Owing to this feature, the external storage implemented inthe form of a hard disk or floppy disk can be realized by a memory chipfabricated according to the teachings of the invention. Besides, becauseof nonvolatileness of the main memory, a computer incorporating thistype of main memory can instantaneously be restored to the stateprevailing immediately before interruption of the power supply.

Additionally, by using the semiconductor memory device described inconjunction with the sixth to tenth embodiments as a cache memory in amicroprocessor, not only the cache memory can be made nonvolatile butalso power consumption of the microprocessor can be decreasedsignificantly.

As is apparent from the foregoing description, there is providedaccording to the invention the semiconductor memory devices which can beimplemented with a small number of memory elements which per se haveinformation or data storing capability while mitigating the requirementimposed on the area for implementation without need for cooling at acryogenic level of temperature. Thus, by using the semiconductor memorydevice according to the invention, there can be realized a nonvolatilememory device susceptible to high speed rewrite operation.

We claim:
 1. A semiconductor element comprising: a source region, adrain region, a channel forming region connecting said source region andsaid drain region and a gate applying an electric field to said channelforming region, and a carrier confinement region isolated by saidchannel forming region and by a potential barrier between said channelforming region and the carrier confinement region, wherein said carrierconfinement region is formed of a conductor or semiconductor grainsdisposed between said channel forming region and said gate andsurrounded by an insulator, and further wherein said carrier confinementregion is smaller in width than said gate, and said carrier confinementregion satisfies a condition as given by q²/2C_(tt)>kT where C_(tt)represents a total capacitance existing around said carrier confinementregion, k represents Boltzmann's constant, T represents a temperature indegree Kelvin, and q represents a charge of an electron.
 2. Asemiconductor element according claim 1, wherein a plurality of saidcarrier confinement regions are provided.
 3. A semiconductor elementaccording to claim 1, wherein said carrier confinement region iscomprised of silicon.
 4. A semiconductor element according to claim 1,wherein said carrier confinement region has a capacitance of no morethan 3 aF.